Micro and Nano Manufacturing
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Follow on Instagram for UpdatesMicro and Nano Manufacturing Syllabus — Unit-wise Content
The official GTU curriculum for Micro and Nano Manufacturing (subject code 2740802) as prescribed for M( · Semester 4 divides the course into 6 units, covering 79 listed topics. The unit-wise breakdown below is read from the GTU syllabus document for this subject code, so you can check what the course actually covers before deciding which papers to attempt.
Download the official syllabus PDF (2740802)Unit 1 Introduction
- Micro fabrication Techniques: Lithography
- Thin Film Deposition and Doping
- Etching and Substrate Removal
- Substrate Bonding
- MEMS Fabrication Techniques
- Bulk Micromachining
- Surface Micromachining
- High- Aspect- Ratio Micromachining
Unit 2 Micro-Machining
- Material removal at micro-scale: size effect
- chip thickenss
- Micro-Structure and Grain Size Effects
- Tool geometry
- Tool wear, and Tool Deflections
- Tool Stiffness and Deflections under Dynamic Loading
- Micro Turnig and Micro Milling
Unit 3 Etching
- Characterizing etching processes in bulk micromachining
- microfabrication of MEMS and semiconductor devices
- basics of microfabrication
- integrated circuit fabrication
- crystallography and its effects
- silicon as substrate and structural material
- stress and strain
- crystal plane effects on etching
- wet etching process
- reaction phenomena
- anisotropic etching
- isotropic etch curves
- masking for anisotropic etchants
- etching control
- fusion bonding of silicon on an insulator
- deep reactive ion etching
- fabrication of a cantilever probe
- microprocessors and applications
- problems with etching in bulk micromachining
Unit 4 Lithography
- Principle of the soft lithography and applications -principle of microcontact printing and applications
- characterizing the surface micromachining process
- isolation layer
- sacrificial layer
- structural material
- selective etching – properties
- stress measurement
- wafer bonding: anodic and fusion
- Micro and nanotechnology: Applications for space micropropulsion
- subsystems and devices for miniaturised spacecrafts micropropulsion: microbolomete
- micro FEEP
- integrated cold-gas microthruster
- pyrotechnic actuator and microvalve etc - propulsion systems: solid propellant
Unit 5 Carbon nanotube production and applications
- Basis of nanotechnology
- structure and properties of carbon nanotubes- production of carbon nanotube: chemical vapour deposition
- arc discharge
- laser ablation
- mechanisms of growth
- purification of carbon nanotube
- applications: electrical transport of carbon nanotubes for FET, Computers
- nanodevices for biomedical
- X-ray equipment
- nanomechanic actuator and artificial muscles
- fuel cells
- membrane electrode assembly
- mechanical and electrical reinforcement of bipolar plates
- hydrogen storage
Unit 6 Carbon based nanostructures
- Structure of carbon nanotubes
- double helical
- hierarchical morphology
- structure of fullerenes
- structure of carbon nanoballs
- structure of carbon nanofibers
- porous carbon
- properties of carbon nanostructures
- synthesis potential applications of nanostructures - composite materials - nanotechnology for fuel cell applications: nanoparticles in heterogeneous catalysis
- O2 electroreduction reaction on carbon-supported Pt catalysts
- carbon nanotubes as catalyst supports References: 1
- Koc M and Ozel T, Micro-manufacturing: Design and Manufacturing of micro products
- Mahalik N P, Micro-manufacturing and nanotechnology
- Jackson M J, Micro and nano-manufacturing
- Ramsden J, Micro & nano technologies
- Kahrizi M, Micromachining techniques for fabrication of micro
- nano structures. 6
- Gabor L H, Tibbals H F, Dutta J and Moore J, Introduction to Nanoscience and Nanotechnology, CRC
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