Unit 1 Introduction to basic concepts of vacuum

3 lecture hours

• Equation of state for ideal gases and real gases
• velocity and speed of gas molecules
• the mean free path
• transport processes
• Viscosity diffusion and heat transfer in gas

Unit 2 Basic theory of pumping

4 lecture hours

• Basic definitions of vacuum techniques
• resistance and conductance of arbitrary vacuum pipe work
• fundamental equation of vacuum technique
• regions of gas flow in pipes
• calculation of pump down time

Unit 3 Interaction of gases with solids

2 lecture hours

• Taking up and evolution of gases by solids
• adsorption and desorption of gases
• Solubility and diffusion of gases in solids

Unit 4 Production of vacuum

12 lecture hours

• Classification of vacuum pumps
• Operating limits and ranges of vacuum pump
• Types of vacuum pumps - Oil sealed rotary
• roots blower
• turbo molecular
• water ring
• getter pumps
• cryogenic pumps
• operation and salient features of these pumps
• Baffles and traps used with pumps

Unit 5 Vacuum gauges

10 lecture hours

• ranges of vacuum gauges
• thermal conductivity gauges
• hot cathode and cold cathode ionization gauges
• working and salient features

Unit 6 Leak hunting

5 lecture hours

• Tightness of vacuum system
• leak detection methods
• halide leak detector
• mass spectrometer leak detector
• trouble shooting and maintenance of vacuum systems
• degassing procedures

Unit 7 Vacuum system components

• Demountable vacuum joints
• electrical lead
• Vacuum valves 2 5

Unit 8 Vacuum materials

2 lecture hours

• Basic requirements
• metals & their alloys
• nonmetallic materials
• pump fluids

Unit 9 Design and calculation of vacuum system

2 lecture hours

• Gas flow in vacuum systems
• conductance calculations and measurements on vacuum piping networks
• Selection of pumping Program Name: Engineering Level: PG Branch: Cryogenic Engineering Course / Subject Code : ME01074021 Course / Subject Name : Vacuum Engineering w.e.f. 2024-25 http://syllabus.gtu.ac.in Page no. 3 of 4 Unit No
• Content No. of Hours % of Weightage facilities – determination of intrinsic speed-matching pumps operating in series and in parallel
• calculation of fore vacuum cylinders

Unit 10 Application of vacuum

4 lecture hours

• Vacuum Technology for semiconductor chip manufacturing
• Space application
• Vacuum based coating units for thin film deposition
• Vacuum for Solar (Thermal and PV)
• Vacuum for metallurgical and pharmaceutical applications