Mems And Bio Mems
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Follow on Instagram for UpdatesMems And Bio Mems Syllabus — Unit-wise Content
The official GTU curriculum for Mems And Bio Mems (subject code 3173908) as prescribed for Nano · Semester 7 divides the course into 5 units, covering 31 listed topics. The unit-wise breakdown below is read from the GTU syllabus document for this subject code, so you can check what the course actually covers before deciding which papers to attempt.
Download the official syllabus PDF (3173908)Unit 1 MEMS MICROFABRICATION
- Historical Development of Microelectronics
- Evolution of Microsensors
- Evolution of MEMS
- Emergence of Micromachines
- Modeling - Finite Element Analysis
- Fabrication – ALD, Lithography Micromachining
- LIGA and Micromolding
- Packaging – Challenges
- Materials and Processes
Unit 2 SCALING OF MEMS
- Introduction to Scaling Issues
- Scaling effects on a cantilever beam
- Scaling of electrostatic actuators
- Scaling of thermal actuator
- Scaling of Thermal Sensors
- mechanics and electrostatistics
- Influence of scaling on material properties
Unit 3 MICROSYSTEMS
- Mechanics for Microsystems design Thermomechanics
- fracture mechanics
- thin film mechanics
- Microfluid mechanics. 8 Subject Code: 3173908 w.e.f
- AY 2018-19 REFERENCES: 1
- Ken Gilleo
- MEMS/MOEMS Packaging: Concepts
- Materials and Processes
- Marc Madou
- Fundamentals of Microfabrication
- CRC Press 1997. 3
- MEMS and Microsystems design and manufacture
- Tai-Ran Hsu, Tata Mc Graw Hill 2011
Unit 5 Tai-Ran Hsu, MEMS and Microsystems
- Design and Manufacture
Unit 6 Vijay Varadan, Xiaoning Jiang, and Vasundara Varadan, Microstereolithography and other Fabrication
- Techniques for 3D MEMS
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